Solidus Technologies
Dynamically Measure your MEMS Devices
The Solidus Technologies,Inc. STI3000 MEMS test system dynamically measures gyroscopes, accelerometers, IMU's, microphones, micro-speakers, magnetometers, pressure sensors or mixed signal ASICs. The system is easily adaptable to device handlers, wafer probers and specialty probers like the SemiProbe Vacuum prober shown here. The system measures resonant frequency, quality factor, stiction, quadrature error, hysteresis, spring rate, phase response, capacitance or leakage. This system has been fully integrated for use with all probing systems and device handlers. Full system integration with SemiProbe Vacuum Probing systems has been done for both semi and fully automatic vacuum probing systems. The SemiProbe Vacuum probing system can be purchased in a semiautomatic configuration and field upgraded to fully automatic! For more information on these system please let us know.